A Comparative Study of Deep-Learning Object Detectors for Semiconductor Defect Detection

Dehaerne, EnriqueEnriqueDehaerneDey, BappadityaBappadityaDeyHalder, SandipSandipHalder2023-04-202023-02-242023-03-072023-04-202022naWOS:000913346300157https://imec-publications.be/handle/20.500.12860/41138A Comparative Study of Deep-Learning Object Detectors for Semiconductor Defect DetectionProceedings paper10.1109/ICECS202256217.2022.9971022978-1-6654-8823-5WOS:000913346300157