Influence of precursor gas on SiGe epitaxial material quality in terms of structural and electrical defects

Ike, ShinichiShinichiIkeSimoen, EddyEddySimoenShimura, YosukeYosukeShimuraHikavyy, AndriyAndriyHikavyyVandervorst, WilfriedWilfriedVandervorstLoo, RogerRogerLooTakeuchi, WakanaWakanaTakeuchiNakatsuka, OsamuOsamuNakatsukaZaima, ShigeakiShigeakiZaima2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25410Influence of precursor gas on SiGe epitaxial material quality in terms of structural and electrical defectsProceedings paperhttps://confit.atlas.jp/guide/event/ssdm2015/subject/G-4-4/class?cryptoId=