Nyns, LauraLauraNynsLisoni, JuditJuditLisoniVan den Bosch, GeertGeertVan den BoschVan Elshocht, SvenSvenVan ElshochtVan Houdt, JanJanVan Houdt2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/22872Atomic layer deposition of scandium-based oxidesMeeting abstracthttp://www.emrs-strasbourg.com/index.php?option=com_abstract&task=view&id=209&day=2013-05-28&year=2013&Itemid=99999999&id_season