Ka, XiongXiongKaRobertson, JohnJohnRobertsonPourtois, GeoffreyGeoffreyPourtoisPetry, JasmineJasminePetryMüller, MarkusMarkusMüller2021-10-172021-10-1720080021-8979https://imec-publications.be/handle/20.500.12860/13934Impact of incorporated Al on the TiN/HfO2 interface effective work functionJournal article