CVD based selective Co deposition on Cu and W for via pre-fill

Chen, PhilPhilChenZheng, Jun-FeiJun-FeiZhengLieten, RubenRubenLietenFrye, AsaAsaFryeBaum, ThomasThomasBaumO'Neill, JamesJamesO'Neillvan der Veen, MarleenMarleenvan der VeenMurdoch, GayleGayleMurdochBoemmels, JuergenJuergenBoemmelsTokei, ZsoltZsoltTokeiXu, JeffJeffXuZhu, JohnJohnZhuBao, JerryJerryBaoBadaroglu, MustafaMustafaBadarogluYeap, GeoffreyGeoffreyYeap2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/26432CVD based selective Co deposition on Cu and W for via pre-fillMeeting abstract