Focus and dose de-convolution technique for improved CD-control of immersion clusters

Charley, Anne-LaureAnne-LaureCharleyD'have, KoenKoenD'haveLeray, PhilippePhilippeLerayLaidler, DavidDavidLaidlerCheng, ShauneeShauneeChengDusa, MirceaMirceaDusaHinnen, PaulPaulHinnenVanoppen, PeterPeterVanoppen2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/16842Focus and dose de-convolution technique for improved CD-control of immersion clustersProceedings paper