Fallica, RobertoRobertoFallicaRezvani, Seyed JavidSeyed JavidRezvaniNannarone, StefanoStefanoNannaroneBorisov, SergeiSergeiBorisovDe Simone, DaniloDaniloDe SimoneBabin, SergeySergeyBabinLorusso, GianGianLorussoVandenberghe, GeertGeertVandenberghe2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/32948The hidden energy tail of low energy electrons in EUV lithographyProceedings paperhttps://doi.org/10.1117/12.2514998