Investigation of Reactive Ion Etching Processes on Mg-Based Oxide Semiconductors: MgZnO

Ghorbani, LeilaLeilaGhorbaniKundu, ShreyaShreyaKunduLi, JieJieLiKundu, SouvikSouvikKunduMukherjee, ShankhaShankhaMukherjeeKruv, AnastasiiaAnastasiiaKruvDe Gendt, StefanStefanDe Gendt2025-04-292025-04-292025-APR 1WOS:001469177800001https://imec-publications.be/handle/20.500.12860/45563Investigation of Reactive Ion Etching Processes on Mg-Based Oxide Semiconductors: MgZnOJournal article10.1021/acsaelm.5c00029WOS:001469177800001INDUCTIVELY-COUPLED PLASMATHIN-FILMSZNO FILMSCL-2/AR