Donaton, R. A.R. A.DonatonMaex, KarenKarenMaexVantomme, AndreAndreVantommeSt. Amour, A.A.St. AmourSturm, J. C.J. C.Sturm2021-09-292021-09-291996https://imec-publications.be/handle/20.500.12860/1216Comparison of Co silicidation on SiGe and SiGeC alloysOral presentation