High-speed full 3D feature metrology for litho monitoring, matching and model calibration with scatterometry

Cramer, H.H.CramerChen, AnAnChenLi, FrankFrankLiLeray, PhilippePhilippeLerayCharley, Anne-LaureAnne-LaureCharleyVan Look, LieveLieveVan LookBekaert, JoostJoostBekaertCheng, ShauneeShauneeCheng2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/20505High-speed full 3D feature metrology for litho monitoring, matching and model calibration with scatterometryProceedings paper