BPZT HBARs as large-amplitude stress transducers at GHz frequencies

Bhaskar, U.K.U.K.BhaskarTierno, DavideDavideTiernoTalmelli, GiacomoGiacomoTalmelliCiubotaru, FlorinFlorinCiubotaruAdelmann, ChristophChristophAdelmannMatzen, S.S.MatzenDevolder, T.T.Devolder2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/32542BPZT HBARs as large-amplitude stress transducers at GHz frequenciesProceedings paper