Van Nieuwenhuysen, KrisKrisVan NieuwenhuysenDuerinckx, FilipFilipDuerinckxBilyalov, RenatRenatBilyalovDekkers, HaroldHaroldDekkersBeaucarne, GuyGuyBeaucarnePoortmans, JefJefPoortmans2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9773Epitaxial Si thin films by high-temperature CVDProceedings paper