Nyns, LauraLauraNynsRagnarsson, Lars-AkeLars-AkeRagnarssonHall, L.L.HallDelabie, AnneliesAnneliesDelabieHeyns, MarcMarcHeynsVan Elshocht, SvenSvenVan ElshochtVinckier, ChrisChrisVinckierZimmerman, PaulPaulZimmermanDe Gendt, StefanStefanDe Gendt2021-10-172021-10-1720080013-4651https://imec-publications.be/handle/20.500.12860/14233Silicon orientation effects in the atomic layer deposition of hafnium oxideJournal article