Smirnov, EvgenyEvgenySmirnovFerchichi, AbdelkarimAbdelkarimFerchichiHuffman, CraigCraigHuffmanBaklanov, MikhaïlMikhaïlBaklanov2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/18004Impact of plasma exposure on organic low-k materialsProceedings paper