De Gendt, StefanStefanDe GendtKnotter, D. M.D. M.KnotterKenis, KarineKarineKenisMertens, PaulPaulMertensHeyns, MarcMarcHeyns2021-09-302021-09-301997https://imec-publications.be/handle/20.500.12860/1805Impact of iron contamination and SC1 generated roughness on 5nm gate oxidesOral presentation