Kang, ShuoShuoKangIacovo, SerenaSerenaIacovoD'have, KoenKoenD'haveVan Huylenbroeck, StefaanStefaanVan HuylenbroeckOkudur, Oguzhan OrkutOguzhan OrkutOkudurAlexeev, AntonAntonAlexeevPlach, ThomasThomasPlachProbst, GernotGernotProbstDing, TaotaoTaotaoDingWimplinger, MarkusMarkusWimplingerUhrmann, ThomasThomasUhrmannDe Vos, JoeriJoeriDe VosBeyer, GeraldGeraldBeyerBeyne, EricEricBeyne2025-04-102024-12-072025-04-102024979-8-3503-7599-20569-5503WOS:001260983500063https://imec-publications.be/handle/20.500.12860/44933Investigation of Distortion in Wafer-to-wafer Bonding with Highly Bowed WafersProceedings paper10.1109/ECTC51529.2024.00069979-8-3503-7598-5WOS:001260983500063