Linear arrays of poly Si-Ge uncooled microbolometers with CMOS readout as long wavelength infrared sensors

Kavadias, SpyrosSpyrosKavadiasDe Moor, PietPietDe MoorGastal, MartinMartinGastalVan Hoof, ChrisChrisVan Hoof2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5894Linear arrays of poly Si-Ge uncooled microbolometers with CMOS readout as long wavelength infrared sensorsProceedings paper