White beam synchroton x-ray topography and x-ray diffraction measurements of epitaxial lateral overgrowth of GaN

Chen, W. M.W. M.ChenMcNally, P. J.P. J.McNallyJacobs, KoenKoenJacobsTuomi, T.T.TuomiDanilewsky, A. N.A. N.DanilewskyLowney, D.D.LowneyKanatharana, J.J.KanatharanaKnuuttila, L.L.KnuuttilaRiikonen, J.J.Riikonen2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5137White beam synchroton x-ray topography and x-ray diffraction measurements of epitaxial lateral overgrowth of GaNOral presentation