The Prospect of Spatially Accurate Reconstructed Atom Probe Data Using Experimental Emitter Shapes

Op de Beeck, JonathanJonathanOp de BeeckScheerder, JeroenJeroenScheerderGeiser, Brian P.Brian P.GeiserBunton, Joseph H.Joseph H.BuntonUlfig, Robert M.Robert M.UlfigLarson, David J.David J.Larsonvan der Heide, PaulPaulvan der HeideVandervorst, WilfriedWilfriedVandervorstFleischmann, ClaudiaClaudiaFleischmann2023-01-182022-04-142023-01-1820221431-9276WOS:000776038000001https://imec-publications.be/handle/20.500.12860/39619The Prospect of Spatially Accurate Reconstructed Atom Probe Data Using Experimental Emitter ShapesJournal article10.1017/S143192762101357XWOS:000776038000001FIELD EVAPORATION BEHAVIORULTRA-FAST LASERTIP SHAPELOCAL MAGNIFICATIONTOMOGRAPHYEVOLUTIONMODELSIMULATIONELECTRONOXIDE