Biophotonic applications integrated on chip through CMOS-compatible integrated SiN photonic waveguides

Van Dorpe, PolPolVan DorpeVercruysse, DriesDriesVercruysseClaes, TomTomClaesNeutens, PieterPieterNeutensKerman, SarpSarpKermanMahmud Ul Hasan, Hasan MDHasan MDMahmud Ul HasanMukund, VigneshVigneshMukundJansen, RoelofRoelofJansenJans, HildeHildeJansGarcia Munoz, VictorVictorGarcia MunozTyagi, Hemant KumarHemant KumarTyagiRottenberg, XavierXavierRottenberg2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/29668Biophotonic applications integrated on chip through CMOS-compatible integrated SiN photonic waveguidesProceedings paper