Dopant, composition and carrier profiling for 3D-structures

Vandervorst, WilfriedWilfriedVandervorstFleischmann, ClaudiaClaudiaFleischmannBogdanowicz, JanuszJanuszBogdanowiczCelano, UmbertoUmbertoCelanoParedis, KristofKristofParedisBudrevich, AABudrevich2021-10-242021-10-2420171369-8001https://imec-publications.be/handle/20.500.12860/29762Dopant, composition and carrier profiling for 3D-structuresJournal articlehttp://www.sciencedirect.com/science/article/pii/S1369800116304619