Detavernier, C.C.DetavernierVan Meirhaeghe, R. L.R. L.Van MeirhaegheCardon, F.F.CardonMaex, KarenKarenMaex2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5248CoSi2 formation through SiO 2Journal article