Verdonck, PatrickPatrickVerdonckSwart, J.J.SwartBrasseur, GuyGuyBrasseurDe Geyter, PascalPascalDe Geyter2021-09-292021-09-291995https://imec-publications.be/handle/20.500.12860/990Analysis of the etching mechanisms of tungsten in fluorine containing plasmasJournal article