Charge trapping, mobility degradation and reliability of high-e gate stacks

Cartier, EduardEduardCartierKerber, AndreasAndreasKerberPantisano, LuigiLuigiPantisanoCarter, RichardRichardCarterKauerauf, ThomasThomasKaueraufDegraeve, RobinRobinDegraeve2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6084Charge trapping, mobility degradation and reliability of high-e gate stacksOral presentation