Record low contact resistivity to n-type Ge for CMOS and memory applications

Martens, KoenKoenMartensFirrincieli, AndreaAndreaFirrincieliRooyackers, RitaRitaRooyackersVincent, BenjaminBenjaminVincentLoo, RogerRogerLooLocorotondo, SabrinaSabrinaLocorotondoRosseel, ErikErikRosseelVandeweyer, TomTomVandeweyerHellings, GeertGeertHellingsDe Jaeger, BriceBriceDe JaegerMeuris, MarcMarcMeurisFavia, PaolaPaolaFaviaBender, HugoHugoBenderDouhard, BastienBastienDouhardDelmotte, JorisJorisDelmotteVandervorst, WilfriedWilfriedVandervorstSimoen, EddyEddySimoenJurczak, GosiaGosiaJurczakWouters, DirkDirkWoutersKittl, JorgeJorgeKittl2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17591Record low contact resistivity to n-type Ge for CMOS and memory applicationsProceedings paper