The impact of focused ion beam induced damage on scanning spreading resistance microscopy

Pandey, KomalKomalPandeyParedis, KristofKristofParedisHantschel, ThomasThomasHantschelDrijbooms, ChrisChrisDrijboomsVandervorst, WilfriedWilfriedVandervorst2021-10-292021-10-2920202045-2322https://imec-publications.be/handle/20.500.12860/35697The impact of focused ion beam induced damage on scanning spreading resistance microscopyJournal articlehttps://www.nature.com/articles/s41598-020-71826-w