Silicide and shallow trench isolation line width dependent stress induced junction leakage

Steegen, AnAnSteegenLauwers, AnneAnneLauwersde Potter de ten Broeck, MurielMurielde Potter de ten BroeckBadenes, GonçalGonçalBadenesRooyackers, RitaRitaRooyackersMaex, KarenKarenMaex2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4770Silicide and shallow trench isolation line width dependent stress induced junction leakageProceedings paper