Impact of "terminal effect" on Cu plating: options and roadmap

Armini, SilviaSilviaArminiTokei, ZsoltZsoltTokeiVolders, HennyHennyVoldersEl-Mekki, ZaidZaidEl-MekkiRadisic, AlexAlexRadisicBeyer, GeraldGeraldBeyerRuythooren, WouterWouterRuythoorenVereecken, PhilippePhilippeVereecken2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/16665Impact of "terminal effect" on Cu plating: options and roadmapOral presentationhttp://www.mam-conference.org/Mam-conference/Welcome.html