Experimental measurements of diffraction for periodic patterns by 193-nm polarized radiation compared to rigorous EMF simulations

Bennett, Marylyn HoyMarylyn HoyBennettGrenville, AndrewAndrewGrenvilleHector, ScottScottHectorPalmer, ShaneShanePalmerLeunissen, PeterPeterLeunissenPhilipsen, VickyVickyPhilipsenBloomstein, TheodoreTheodoreBloomsteinHardy, Denis E.Denis E.HardyRothschild, MordechaiMordechaiRothschildHilfiker, James N.James N.Hilfiker2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10083Experimental measurements of diffraction for periodic patterns by 193-nm polarized radiation compared to rigorous EMF simulationsProceedings paper