Sun, Y.Y.Sunvan Zeijl, H.H.van ZeijlTauritz, J. L.J. L.TauritzBaets, RoelRoelBaets2021-09-292021-09-291996https://imec-publications.be/handle/20.500.12860/1518Suspended membrane inductors and capacitors for application in silicon MMIC'sProceedings paper