Augendre, EmmanuelEmmanuelAugendreRooyackers, RitaRitaRooyackersde Potter de ten Broeck, MurielMurielde Potter de ten BroeckKunnen, EddyEddyKunnenBeckx, StephanStephanBeckxMannaert, GeertGeertMannaertVrancken, ChristaChristaVranckenVassilev, VesselinVesselinVassilevChiarella, ThomasThomasChiarellaJurczak, GosiaGosiaJurczakDebusschere, IngridIngridDebusschere2021-10-152021-10-152003-09https://imec-publications.be/handle/20.500.12860/7159Thin L-shaped spacers for CMOS devicesProceedings paper