Development of a CMOS compatible biophotonics platform based on SiN nanophotonic waveguides

Neutens, PieterPieterNeutensClaes, TomTomClaesJansen, RoelofRoelofJansenSubramanian, AnanthAnanthSubramanianMahmud Ul Hasan, Hasan MDHasan MDMahmud Ul HasanRochus, VeroniqueVeroniqueRochusJames Shirley, FinubFinubJames ShirleyDu Bois, BertBertDu BoisHelin, PhilippePhilippeHelinSeveri, SimoneSimoneSeveriLeyssens, KennyKennyLeyssensDhakal, AshimAshimDhakalPeyskens, FredericFredericPeyskensSelvaraja, ShankarShankarSelvarajaDeshpande, ParuParuDeshpandeBaets, RoelRoelBaetsLagae, LiesbetLiesbetLagaeRottenberg, XavierXavierRottenbergVan Dorpe, PolPolVan Dorpe2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/24318Development of a CMOS compatible biophotonics platform based on SiN nanophotonic waveguidesProceedings paperhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?tp=&arnumber=6988942