Missinne, JeroenJeroenMissinneKostov, PlamenPlamenKostovVan Hoe, BramBramVan HoeBosman, ErwinErwinBosmanGaberl, WolfgangWolfgangGaberlZimmermann, HorstHorstZimmermannVan Steenberge, GeertGeertVan Steenberge2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/22811Ultra-thin multi-axial shear stress sensor based on a segmented photodiodeProceedings paper