Vitale, WolfgangWolfgangVitaleFernández-Bolaños, MontserratMontserratFernández-BolañosMerkel, ReinhartReinhartMerkelEnayati, AminAminEnayatiOcket, IljaIljaOcketDe Raedt, WalterWalterDe RaedtWeber, JosefJosefWeberRamm, PeterPeterRammIonescu, Adrian M.Adrian M.Ionescu2021-10-232021-10-232015https://imec-publications.be/handle/20.500.12860/26146Fine pitch 3D-TSV based high frequency components for RF MEMS applicationsProceedings paperhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=7159650