Barbagini, FrancescaFrancescaBarbaginiHalder, SandipSandipHalderJanssens, TomTomJanssensKenis, KarineKarineKenisWostyn, KurtKurtWostynBearda, TwanTwanBeardaLe, Quoc ToanQuoc ToanLeLeunissen, PeterPeterLeunissenMertens, PaulPaulMertensKim, Kyung HyunKyung HyunKimAndreas, MichaelMichaelAndreas2021-10-172021-10-1720090169-4243https://imec-publications.be/handle/20.500.12860/14942Particle removal efficiency and damage analysis on silicon wafers after megasonic cleaning in solventsJournal article