MuGFET Observation and CD measurement by using CD-SEM

Maeda, TatsuyaTatsuyaMaedaTanaka, MakiMakiTanakaIsawa, MikiMikiIsawaWatanabe, KenjiKenjiWatanabeHasegawa, NorioNorioHasegawaSekiguchi, KoheiKoheiSekiguchiRooyackers, RitaRitaRooyackersCollaert, NadineNadineCollaertVandeweyer, TomTomVandeweyer2021-10-172021-10-172008-02https://imec-publications.be/handle/20.500.12860/14084MuGFET Observation and CD measurement by using CD-SEMProceedings paperhttp://spiedl.org/vsearch/servlet/VerityServlet?KEY=SPIEDL&smode=strresults&sort=rel&maxdisp=25&threshold=0&pjournals=SPIEDL&pos