Shamiryan, DenisDenisShamiryanDanila, AndreyAndreyDanilaParaschiv, VasileVasileParaschivBaklanov, MikhaïlMikhaïlBaklanovBoullart, WernerWernerBoullart2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14459TaN etch mechanisms in BCl3-based plasmasMeeting abstract