Fundamental analysis of the collapse of nano-patterns during wet-processing of advanced interconnects

Zahedmanesh, HoumanHoumanZahedmaneshLe, Quoc ToanQuoc ToanLeVanstreels, KrisKrisVanstreelsGonzalez, MarioMarioGonzalezTokei, ZsoltZsoltTokei2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/30003Fundamental analysis of the collapse of nano-patterns during wet-processing of advanced interconnectsOral presentationhttp://www.mam-conf.org/en/conference-program/postersession.html