MEMS capacitive series switches: optimal test vehicles for the RF self-biasing phenomenon

Rottenberg, XavierXavierRottenbergVaesen, KristofKristofVaesenBrebels, StevenStevenBrebelsNauwelaers, BartBartNauwelaersMertens, RobertRobertMertensDe Raedt, WalterWalterDe RaedtTilmans, HarrieHarrieTilmans2021-10-162021-10-162005-01https://imec-publications.be/handle/20.500.12860/11138MEMS capacitive series switches: optimal test vehicles for the RF self-biasing phenomenonProceedings paper