Conductive diamond tips with sub-nanometer electrical resolution for characterization of nanoelectronics device structures

Hantschel, ThomasThomasHantschelDemeulemeester, CindyCindyDemeulemeesterEyben, PierrePierreEybenSchulz, VolkerVolkerSchulzRichard, OlivierOlivierRichardBender, HugoHugoBenderVandervorst, WilfriedWilfriedVandervorst2021-10-172021-10-1720090031-8965https://imec-publications.be/handle/20.500.12860/15431Conductive diamond tips with sub-nanometer electrical resolution for characterization of nanoelectronics device structuresJournal article