San Andres Serrano, EnriqueEnriqueSan Andres SerranoPantisano, LuigiLuigiPantisanoSeveri, SimoneSimoneSeveriTrojman, LionelLionelTrojmanFerain, IsabelleIsabelleFerainToledano-Luque, M.M.Toledano-LuqueJurczak, GosiaGosiaJurczakGroeseneken, GuidoGuidoGroesenekenDe Gendt, StefanStefanDe GendtHeyns, MarcMarcHeyns2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12838Mobility extraction using RFCV for 80nm MOSFET with 1nm EOT HfSiON/TiNJournal article