Chen, PengPengChenChu, Paul K.Paul K.ChuHöchbauer, T.T.HöchbauerNastasi, M.M.NastasiBuca, D.D.BucaMantl, S.S.MantlTheodore, N. DavidN. DavidTheodoreAlford, T.L.T.L.AlfordMayer, J. W.J. W.MayerLoo, RogerRogerLooCaymax, MattyMattyCaymaxCai, M.M.CaiLau, S.S.Lau2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/8673Plasma hydrogenation of strain-relaxed SiGe/Si heterostructure for layer transferJournal article