Gronheid, RoelRoelGronheidBoeckx, CarolienCarolienBoeckxDoise, JanJanDoiseBekaert, JoostJoostBekaertKarageorgos, IoannisIoannisKarageorgosRyckaert, JulienJulienRyckaertChan, BTBTChanLi, ChenxiChenxiLiZou, YiYiZou2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/26666EUV patterned templates with grapho-epitaxy DSA at the N5/N7 logic nodesProceedings paperhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2505814