Towards carrier profiling in nanometer-wide Si fins with micro four-point probe

Folkersma, StevenStevenFolkersmaBogdanowicz, JanuszJanuszBogdanowiczSchulze, AndreasAndreasSchulzeFavia, PaolaPaolaFaviaFranquet, AlexisAlexisFranquetSpampinato, ValentinaValentinaSpampinatoPetersen, Dirch H.Dirch H.PetersenHansen, OleOleHansenHenrichsen, Henrik H.Henrik H.HenrichsenNielsen, Peter F.Peter F.NielsenShiv, LiorLiorShivVandervorst, WilfriedWilfriedVandervorst2021-10-252021-10-252018https://imec-publications.be/handle/20.500.12860/30720Towards carrier profiling in nanometer-wide Si fins with micro four-point probeProceedings paperhttps://ieeexplore.ieee.org/document/8807934