Control of texture and crystallization in sol-gel PZT ferroelectric capacitors with reactively sputtered RuO2 electrode layers

Norga, GerdGerdNorgaWouters, D. J.D. J.WoutersFè, LauraLauraFèBartic, AndreiAndreiBarticMaes, HermanHermanMaes2021-10-012021-10-011998https://imec-publications.be/handle/20.500.12860/2811Control of texture and crystallization in sol-gel PZT ferroelectric capacitors with reactively sputtered RuO2 electrode layersOral presentation