Joule heating study in scaled Cu, Co and Ru interconnects

Lofrano, MelinaMelinaLofranoVarela Pedreira, OlallaOlallaVarela PedreiraCroes, KristofKristofCroesTokei, ZsoltZsoltTokei2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/33468Joule heating study in scaled Cu, Co and Ru interconnectsProceedings paper