Increasing the predictability of AIMS measurements by coupling to resist simulations

Meliorisz, BalintBalintMelioriszErdmann, AndreasAndreasErdmannSchnattinger, ThomasThomasSchnattingerStrössner, UlrichUlrichStrössnerScherübl, ThomasThomasScherüblDe Bisschop, PeterPeterDe BisschopPhilipsen, VickyVickyPhilipsen2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14145Increasing the predictability of AIMS measurements by coupling to resist simulationsProceedings paper