Evaluation of the accuracy and precision of STEM and EDS metrology on horizontal GAA nanowire devices

Johanesen, HayleyHayleyJohanesenStrauss, MichaelMichaelStraussKenslea, AnneAnneKensleaHakala, ChrisChrisHakalaKwakman, LaurensLaurensKwakmanBoullart, WernerWernerBoullartMertens, HansHansMertensSiew, Yong KongYong KongSiewBarla, KathyKathyBarla2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/33229Evaluation of the accuracy and precision of STEM and EDS metrology on horizontal GAA nanowire devicesProceedings paperhttps://doi.org/10.1117/12.2514995