A 200 mm Wafer-Scale Al2O3 Photonics Waveguide Technology for UV and Visible Applications

Neutens, P.P.NeutensMafakheri, E.E.MafakheriZheng, X.X.ZhengHelin, P.P.HelinJafari, Z.Z.JafariLin, C.C.LinJeevanandam, G.G.JeevanandamPham, Nga P.Nga P.PhamFan, S.S.FanSu, C.C.SuJansen, R.R.JansenVan Dorpe, P.P.Van DorpeLe Thomas, N.N.Le ThomasHaffner, C.C.Haffner2025-05-262025-05-262025-JUN1943-0655WOS:001492164700003https://imec-publications.be/handle/20.500.12860/45724A 200 mm Wafer-Scale Al2O3 Photonics Waveguide Technology for UV and Visible ApplicationsJournal article10.1109/JPHOT.2025.3568162WOS:001492164700003SILICON-NITRIDEULTRAVIOLET