A 200 mm Wafer-Scale Al2O3 Photonics Waveguide Technology for UV and Visible Applications

Neutens, PieterPieterNeutensMafakheri, ErfanErfanMafakheriZheng, X.X.ZhengHelin, PhilippePhilippeHelinJafari, ZeinabZeinabJafariLin, C.C.LinJeevanandam, GaudhamanGaudhamanJeevanandamPham, NgaNgaPhamFan, S.S.FanSu, C.C.SuJansen, RoelofRoelofJansenVan Dorpe, PolPolVan DorpeLe Thomas, N.N.Le ThomasHaffner, ChristianChristianHaffner2025-05-262025-05-262025-JUN1943-0655WOS:001492164700003https://imec-publications.be/handle/20.500.12860/45724A 200 mm Wafer-Scale Al2O3 Photonics Waveguide Technology for UV and Visible ApplicationsJournal article10.1109/JPHOT.2025.3568162WOS:001492164700003SILICON-NITRIDEULTRAVIOLET