Granata, StefanoStefanoGranataBoulord, CarolineCarolineBoulordGovaerts, JonathanJonathanGovaertsBearda, TwanTwanBeardaBeaucarne, GuyGuyBeaucarneSoogund, DeanaDeanaSoogundVaquer Pérez, RaquelRaquelVaquer PérezDross, FredericFredericDrossAbdulraheem, YaserYaserAbdulraheemPoortmans, JefJefPoortmansMertens, RobertRobertMertens2021-10-222021-10-2220140927-0248https://imec-publications.be/handle/20.500.12860/23879Plasma silicone interaction during aSi:H deposition on solar cell wafers bonded to glassJournal articlehttp://www.sciencedirect.com/science/article/pii/S0927024814000543